Polysilicon interdigitated electrodes as impedimetric sensors
نویسندگان
چکیده
منابع مشابه
Polysilicon Interdigitated Electrodes as Impedimetric Sensors
The suitability of polysilicon as a material for the fabrication of interdigitated electrodes and their application to the development of sensors is studied in this work. The main interest in using this material lies in the possibility of obtaining integrated sensors with commercial CMOS technologies and simple post-processing steps. Electrodes with 3μm finger width and 3, 10, and 20μm spacing ...
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ژورنال
عنوان ژورنال: Electrochemistry Communications
سال: 2006
ISSN: 1388-2481
DOI: 10.1016/j.elecom.2006.05.028